Controlled dissolution of quartz material.Part II. Quartz chemical etching applied to blanks industrial manufacturing
نویسندگان
چکیده
In many electronic applications, chemical etching process is used to manufacture the substrates. This method has been applied for long on quartz crystal blanks manufacturing for minor adjustments of the vibration frequencies. This paper pesents a way to implement an industrial chemical etching process specially dedicated for large thickness removals without damaging the blanks surface texture. It will be shown how were defined the choice of the etching solvent, and the most sensitive parameters. An industrial equipement will be presented whose principle was deduced from the sensitivity study of these parameters. Finally, the electrical performances of the resonators processed on this equipment will be compared with the performances achieved by conventionnal means.
منابع مشابه
Controlled dissolution of quartz material.Part I. Controlled dissolution of quartz plates in potassium and sodium hydroxides : chemical thinning down of SC cuts
From previous studies suggesting that controlled crystal growth and crystal dissolution are governed by the same laws, we have previously finalized the chemical lapping or controlled dissolution of AT quartz plates in NaOH,H20. The quality of chemical polishing changes with the crystallographic orientation of plates. Consequently, we have investigated simiiar basic solvents other than NaOH medi...
متن کاملSILICA DISSOLUTION AT LOW pH IN THE PRESENCE AND ABSENCE OF FLUORIDE
SiO2 is the most abundant oxide in the earth and its properties, behaviors and interactions are of immense scientific and technological importance. Of particular importance are the interactions of silica with aqueous fluids because these fluids are present in nearly every natural setting. The dissolution of silica and glass by HF plays a very important role in technology and is widely used for ...
متن کاملA Simple Method to Separate Quartz and Feldspar and Its Application to Tl/osl Methods
In the dating of sediments by luminescence methods, to obtain a sample the purest possible as to its mineralogy determines the rest of the analytical procedures. The isolation of the sample minerals is a critical stage due to the impossibility of quantifying the relative contributions to the dose from the different minerals. In this paper we propose a non chemical method to isolate quartz from ...
متن کاملEvolutionary Continuous Cellular Automaton for the Simulation of Wet Etching of Quartz
Anisotropic wet chemical etching of quartz is a bulk micromachining process for the fabrication of Micro-Electro-Mechanical Systems (MEMS), such as resonators and temperature sensors. Despite the success of the Continuous Cellular Automaton (CCA) for the simulation of wet etching of silicon, the simulation of the same process for quartz has received little attention –especially from an atomisti...
متن کاملDeep SiO2 etching with Al and AlN masks for MEMS devices
Silicon oxide-based materials such as quartz and silica are widely used in Microelectromechanical Systems (MEMS). One way to enhance capability of their deep plasma etching is to increase selectivity by the use of hard masks. Though this approach was studied previously, information on the use of hard masks for etching of silicon-oxide based materials on 200 mm substrates is scarce. We present r...
متن کامل